Microelectronic Engineering · 2011 · 21 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceInterface SciencePhysical ChemistrySemiconductor MaterialsAb Initio MethodsInterface EngineeringSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSilicon MaterialsAb Initio CalculationsAb Initio SimulationsBoron ChemistrySilicon DioxideSilicon Interfaces
13
Transient enhanced diffusion of boron in Si
Sachin Jain, Wim Schoenmaker, Richard Lindsay et al. · Journal of Applied Physics · 2002 · 233 citations