Damp heat stable doped zinc oxide films

Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties

K. Ellmer · Journal of Physics D Applied Physics · 2000 · 590 citations

Natural Sciences, Materials Engineering, Materials Science +17

Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

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Natural Sciences, Materials Engineering, Materials Science +17

Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

O. Kluth, G. Schöpe, J. Hüpkes et al. · Thin Solid Films · 2003 · 344 citations

Natural Sciences, Materials Engineering, Materials Science +16

Transparent conducting oxide films for thin film silicon photovoltaics

W. Beyer, J. Hüpkes, H. Stiebig · Thin Solid Films · 2007 · 239 citations

Engineering, Materials Engineering, Materials Science +14

ZnO thin films and light-emitting diodes

Dae‐Kue Hwang, Min‐Suk Oh, Jae‐Hong Lim et al. · Journal of Physics D Applied Physics · 2007 · 206 citations

Engineering, Materials Engineering, Materials Science +17