Solid State Ionics · 2000 · 109 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemical EngineeringSurface ScienceThin FilmsChemical Vapor DepositionPhysical Vapor DepositionThin Film Electrical PropertiesThin Film OxidationThin-film DepositionThin-film MaterialsLow-temperature DepositionLow-temperature FabricationLow-temperature Processing
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