Theory of optical beam induced current images of defects in semiconductors

T. Wilson, Eithne M. McCabe

Journal of Applied Physics · 1987 · 57 citations · 9 references

Concepts

Abstract

We present a model of image formation in scanning optical microscopes operating in the optical beam induced current mode. A perturbation analysis is used, a point spread function is introduced, and specific images of point defects obtained. It is found that the resolution is not limited by the diffusion length.

References

9