Publication | Closed Access
Low temperature growth of silicon nitride by electron cyclotron resonance plasma enhanced chemical vapour deposition
37
Citations
8
References
2001
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsLow Temperature GrowthSemiconductor Device FabricationChemical VapourChemical DepositionPlasma ProcessingChemical Vapor DepositionSilicon On InsulatorSilicon Nitride
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