Concepedia

Piezoelectric and optical properties of ZnO films deposited by an electron–cyclotron-resonance sputtering system

Michio Kadota, Toshinori Miura, Makoto Minakata

Journal of Crystal Growth · 2002 · 25 citations · 2 references

DOI

Concepts

References

2

p-Type Electrical Conduction in ZnO Thin Films by Ga and N Codoping

Mathew Joseph, Hitoshi Tabata, Tomoji Kawai · Japanese Journal of Applied Physics · 1999 · 568 citations

, , +17

Piezoelectric Properties of ZnO Films on a Sapphire Substrate Deposited by an RF-Magnetron-Mode ECR Sputtering System

Michio Kadota, Makoto Minakata · Japanese Journal of Applied Physics · 1998 · 38 citations

, , +17