Cylindrical spike model for the formation of diamondlike thin films by ion deposition - Concepedia

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Cylindrical spike model for the formation of diamondlike thin films by ion deposition

170

Citations

1

References

1998

Year

H. Feldermann, R. Merk, M. T. Sebastian, Carsten Ronning

Applied Physics A

Materials EngineeringMaterials ScienceIon ImplantationDiamond-like CarbonEngineeringPhysicsNanoelectronicsSurface ScienceApplied PhysicsCondensed Matter PhysicsCylindrical Spike ModelIon DepositionThin FilmsChemical DepositionMicroelectronicsIon EmissionChemical Vapor DepositionDiamondlike Thin Films

References

	Year	Citations

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