Concepedia
Applied Physics A · 1998 · 170 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsIon ImplantationThin Film NucleationThin-film DepositionThin-film MaterialsFilm Growth MechanismsThin-film Growth Mechanisms
1
Ion beam assisted film growth
J. Y. Tsao · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 148 citations
Natural Sciences, Materials Engineering, Materials Science +13