Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 148 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsCrystal GrowthEpitaxial GrowthIon ImplantationThin Film NucleationThin-film DepositionEpitaxial Film GrowthFilm Growth MechanismsIon Beam EtchingThin-film Growth KineticsThin-film Growth Mechanisms