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The role of the substrate surface layer in the process of epitaxy part II. substrate structure and formation of epitaxial films
32
Citations
7
References
1970
Year
Materials ScienceSubstrate Surface LayerEpitaxial GrowthEngineeringEpitaxial FilmsPhysicsEpitaxy Part IiSurface ScienceApplied PhysicsCondensed Matter PhysicsSubstrate SurfaceThin FilmsChemical DepositionMolecular Beam EpitaxyChemical Vapor DepositionThin Film ProcessingCritical Accommodation CentresRelative Nucleation Densities
Abstract A model is presented which explains semi-quantitatively the role of the substrate surface in the epitaxy of vacuum-deposited f.c.c. metal films on alkali halide substrates. The concept of critical accommodation centres is introduced. With the aid of the model the relative nucleation densities as well as the orientations of the nuclei in the initial stages of film growth are predicted for common substrate overgrowth combinations under a variety of growth conditions. The predictions seem to be in general agreement with experimental results.
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