Micropatterning Layers by Flame Aerosol Deposition‐Annealing

Abstract

A flame process for in situ synthesis and micropatterned deposition of highly porous, self-assembled, lace-like nanostructured layers of pure or Pt-doped SnO2 is presented. These layers are stabilized in situ by rapid flame annealing that results in transparent cauliflower-like layers with strong adhesion to substrates containing integrated circuitry, while exhibiting high CO sensitivity (f).