Materials Science and Engineering B · 2003 · 55 citations · 16 references
Natural SciencesMaterials SciencePhysicsMaterials ChemistryOptical MaterialsThin FilmsChemical Vapor DepositionOptical Thin FilmsSemiconductor Thin FilmsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsOptical PropertiesPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionSurface Optical PropertiesThin-film Growth MechanismsThin-film Optoelectronic Materials
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Infrared Spectrum and Structure of Hydrogenated Amorphous Silicon
H. R. Shanks, C. J. Fang, L. Ley et al. · physica status solidi (b) · 1980 · 509 citations