Transparent conductive ZnO film preparation by alternating sputtering of ZnO:Al and Zn or Al targets - Concepedia

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Transparent conductive ZnO film preparation by alternating sputtering of ZnO:Al and Zn or Al targets

65

Citations

9

References

1998

Year

Kikuo Tominaga, N. Umezu, I. Mori, T. Ushiro, Toshihiro Moriga, Ichiro Nakabayashi

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsAl TargetsThin FilmsThin Film Processing

References

	Year	Citations

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