The chemical vapour deposition of indium and copper/indium alloys from metal hexafluoracetylacetonate complexes - Concepedia

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The chemical vapour deposition of indium and copper/indium alloys from metal hexafluoracetylacetonate complexes

15

Citations

8

References

1993

Year

Philip A. Jones, A.D. Jackson, Richard D. Pilkington, Paul D. Lickiss

Thin Solid Films

Materials EngineeringInorganic ChemistryMaterials ScienceMetal Hexafluoracetylacetonate ComplexesEngineeringChemical Vapour DepositionSurface ScienceMetallurgical InteractionChemistryChemical DepositionCopper/indium AlloysElemental MetalChemical Vapor Deposition

References

	Year	Citations

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