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Effect of temperature on pull-in voltage and natural frequency of an electrostatically actuated microplate

EngineeringSoft RoboticsMicrofabricationMechanicsMechanical EngineeringMechatronicsMechanical SystemsPull-in VoltageActuationMicroactuatorMicrofluidicsNatural FrequencyMicro-electromechanical SystemActuated Microplate