Concepedia

Sputter deposition of YBa2Cu3O7−<i>y</i> thin films

Richard M. Silver, J. Talvacchio, Alex de Lozanne

Applied Physics Letters · 1987 · 52 citations · 8 references

DOI

Concepts

Abstract

Thin films of YBa2Cu3O7−y were prepared by magnetron sputtering. The films were characterized by x-ray diffraction, in situ x-ray photoelectron spectroscopy to determine the as-deposited oxygen content for various substrate temperatures, and scanning electron microscopy to analyze the microstructure. The orthorhombic phase was observed after an ex situ 700 °C anneal. We have obtained films which were completely superconducting at 82 K with 6 K transition widths.

References

8

Possible highT c superconductivity in the Ba?La?Cu?O system

J. G. Bednorz, K. A. M�ller · The European Physical Journal B · 1986 · 14.2K citations

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Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressure

Meiying Wu, J. R. Ashburn, C. J. Torng et al. · Physical Review Letters · 1987 · 7.1K citations · Full text

, , +17

Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba<sub>2</sub>YCu<sub>3</sub>O<sub>7-y</sub> Thin Film

Youichi Enomoto, Toshiaki Murakami, Minoru Suzuki et al. · Japanese Journal of Applied Physics · 1987 · 403 citations

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Thin superconducting oxide films

R. B. Laibowitz, R. H. Koch, P. Chaudhari et al. · Physical review. B, Condensed matter · 1987 · 286 citations

, , +17

Critical current densities and transport in superconducting YBa2Cu3O7−δ films made by electron beam coevaporation

Byeong‐Yun Oh, M. Naito, S. B. Arnason et al. · Applied Physics Letters · 1987 · 251 citations

, , +15