Publication | Closed Access
Standardized Terminology for Oxide Charges Associated with Thermally Oxidized Silicon
62
Citations
0
References
1980
Year
Materials ScienceSemiconductorsElectrical EngineeringEngineeringOxide ChargesNanoelectronicsBias Temperature InstabilityOxide SemiconductorsApplied PhysicsOxide ElectronicsStandardized TerminologyStandarized TerminologySilicon On InsulatorMicroelectronicsSilicon SystemElectrochemistrySemiconductor Device
Standarized terminology for oxide charges associated with the thermally oxidized silicon system is presented. This terminology is recommended by a committee established by the Electronics Division of the Electrochemical Society and the IEEE Semiconductor Interface Specialists Conference. All engineers and scientists concerned with oxide charges in silicon semiconductor applications are urged to adopt this terminology.