Auger profiling of ’’abrupt’’ LPE Al<i>x</i>Ga1−<i>x</i>As-GaAs heterojunctions

Abstract

Ion milling–Auger electron spectroscopy has been used to study, for the first time, the chemical widths of ’’abrupt’’ LPE AlxGa1−xAs-GaAs heterojunctions with composition x=0.43, 0.60, and 0.85. ’’Abrupt’’ LPE junctions were found to have chemical interface widths of &amp;lt;90–130 Å.