Publication | Closed Access
A sensitive, handheld vapor sensor based on microcantilevers
62
Citations
10
References
2004
Year
EngineeringMicroelectromechanical SystemsBiomedical EngineeringSensing (Management Information Systems)Sensor TechnologyHandheld Vapor SensorMicromachinesSensing (Sensor Engineering)Biosensing SystemsInstrumentationMicrofluidicsMaterials ScienceExplosive MaterialsHandheld SensorRugged SensorOptical SensorsBiomedical SensorsSensorsMicrofabricationBiomedical DiagnosticsMaterials CharacterizationSensor DesignOptical Sensor
We report the development of a handheld sensor based on piezoresistive microcantilevers that does not depend on optical detection, yet has high detection sensitivity. The sensor is able to detect vapors from the plastic explosives pentaerythritol tetranitrate and hexahydro-1,3,5-triazine at levels below 10 parts per trillion within few seconds of exposure under ambient conditions. A differential measurement technique has yielded a rugged sensor that is unaffected by vibration and is able to function as a “sniffer.” The microelectromechanical system sensor design allows for the incorporation of hundreds of microcantilevers with suitable coatings in order to achieve sufficient selectivity in the future, and thus could provide an inexpensive, unique platform for the detection of chemical, biological, and explosive materials.
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