Publication | Closed Access
Fabrication of heteroepitaxial Si films on sapphire substrates using mesoplasma CVD
13
Citations
16
References
2006
Year
Materials ScienceEngineeringSapphire SubstratesMicrofabricationHeteroepitaxial Si FilmsMesoplasma CvdSurface ScienceApplied PhysicsMultilayer HeterostructuresSemiconductor Device FabricationSilicon On InsulatorEpitaxial GrowthChemical Vapor Deposition
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