High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope

Abstract

A recently developed scanning tip microwave near-field microscope has been improved to achieve a spatial resolution of 100 nm (∼λ/106). Furthermore, explicit calculations of the field distribution using a simplified model allow quantitative microscopy of dielectric properties for dielectric materials. A detection sensitivity of δε/ε∼6×10−4 has been achieved.