Deposition of hard crystalline Al2O3 coatings by bipolar pulsed d.c. PACVD - Concepedia

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Deposition of hard crystalline Al2O3 coatings by bipolar pulsed d.c. PACVD

67

Citations

10

References

1998

Year

Ch. Täschner, B. Ljungberg, Viveka Alfredsson, I. Endler, A. Leonhardt

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsChemical DepositionPulsed Laser DepositionD.c. PacvdSurface ProcessingChemical Vapor Deposition

References

	Year	Citations

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