Fabrication of Ultrathin Single‐Crystal Diamond Membranes

Abstract

Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.