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Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation

EngineeringMicromachinesBiomedical DiagnosticsMicrofabricationMicroscopyMechanical EngineeringScanning Force MicroscopyDigital Image CorrelationBiomedical EngineeringNanoscale Displacement MeasurementMicroactuatorMicrofluidicsOptical MicroscopyMicro-electromechanical System