Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 13 citations · 3 references
Natural SciencesMaterials EngineeringMaterials SciencePlasma PhysicsSurface EngineeringThin FilmsThin-film DepositionEnergy DensityPlasma DepositionPlasma-enhanced DepositionTitanium Oxides
3
Advanced concepts of PVD hard coatings
H. Holleck · Vacuum · 1990 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +14
Material surface modification by pulsed ion beam
Zhigang Shen, C. H. Lee, Cheng Wu et al. · Journal of Materials Science · 1990 · 12 citations