Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

Modeling and verifying non-linearities in heterodyne displacement interferometry

S.J.A.G. Cosijns, Han Haitjema, P.H.J. Schellekens · Precision Engineering · 2002 · 126 citations

Engineering, Mechanical Engineering, Optoelectronics +9

Non-linearity in length measurement using heterodyne laser Michelson interferometry

C M Sutton · Journal of Physics E Scientific Instruments · 1987 · 106 citations

Engineering, Physics, Instrumentation +16

Electronic speckle pattern interferometric system based on a speckle reference beam

Gudmunn Å. Slettemoen · Applied Optics · 1980 · 72 citations

Engineering, Biomedical Engineering, Machine Vision +12

Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry

Ming-Hung Chiu, Shinn-Fwu Wang, Rong-Seng Chang · Applied Optics · 2004 · 61 citations

Engineering, Physics, Optics +16

Optical parts and the nonlinearity in heterodyne interferometers

Wenmei Hou · Precision Engineering · 2006 · 61 citations

Natural Sciences, Electrical Engineering, Physics +14