Cluster ion sources (invited)

TLDR

Clusters from gases and metal vapors can be produced by expanding nozzle flows under suitable flow conditions, characterized by the condensation scaling parameter Γ*, and the resulting low‑specific‑charge cluster ion beams enable energetic particle beams in the 0.01–10 keV/atom range, opening new scientific and technological applications. This paper provides a status report on clusters and cluster ions from nozzle sources. The authors describe the construction and results of a high‑intensity silver cluster beam source intended for thin‑film formation.

Abstract

Clusters from gases as well as from metal vapors can be obtained from an expanding nozzle flow with the appropriate set of flow field conditions, characterized by a condensation scaling parameter Γ*. Cluster ion beams are characterized by a low specific charge. Accelerated cluster ion beams allow formation of energetic particle beams in the interesting range of 0.01–10 keV/atom, and the specific characteristics of cluster ion beams have led to new applications in science and technology. In this paper a status report on clusters and cluster ions from nozzle sources is given. As example the construction and results of a source for high-intensity silver cluster beams to be used for thin film formation are described.