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Nucleation and growth analysis of microcrystalline silicon by scanning probe microscopy: substrate dependence, local structural and electronic properties of as-grown surfaces

Materials ScienceGrowth AnalysisEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationMicrocrystalline SiliconElectronic PropertiesSilicon On InsulatorEpitaxial GrowthMicrostructure