Natural SciencesMaterials SciencePhysicsOptical MaterialsPlasma PhysicsThin FilmsOptical Properties Of SolidsOptical Thin FilmsSilicon MaterialsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsHollow Cathode DischargesOptical ConstantsSilicon Thin Films
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Plasma physics and technology; industrial applications
G. Bonizzoni, E. Vassallo · Vacuum · 2002 · 159 citations