Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays - Concepedia

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Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

25

Citations

33

References

2013

Year

Fredrik Forsberg, Niclas Roxhed, Andreas Fischer, Björn Samel, Per Ericsson, Nils Høivik, Adriana Lapadatu, Martin Bring, Gjermund Kittilsland, Göran Stemme,

Infrared Physics & Technology

Wafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Device IntegrationThree-dimensional Heterogeneous IntegrationInfrared SensorApplied PhysicsWafer-level Vacuum PackagingInfrared OpticElectronic PackagingInstrumentationMicroelectronics

References

	Year	Citations

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