Accelerator mass spectrometry solutions to semiconductor problems

Equilibrium-charge-state distributions of energetic ions (Z > 2) in gaseous and solid media

A. B. Wittkower, H. D. Betz · Atomic Data and Nuclear Data Tables · 1973 · 281 citations

Natural Sciences, Chemistry, Physics +13

Pulse-height defects for heavy ions in a silicon surface-barrier detector

B. D. Wilkins, M. J. Fluss, S. Kaufman et al. · Nuclear Instruments and Methods · 1971 · 144 citations

Engineering, Electrical Engineering, Materials Science +16

An analysis of the causes of the pulse height defect and its mass dependence for heavy-ion silicon detectors

E.C. Finch · Nuclear Instruments and Methods · 1973 · 38 citations

Engineering, Electrical Engineering, Physics +15

Detection of semiconductor dopants using accelerator mass spectrometry

J. Anthony, D. J. Donahue, A. J. T. Jull et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 18 citations

Natural Sciences, Chemistry, Materials Science +10

Instrumental Neutron Activation Analysis of Processed Silicon

J. A. Keenan, Bruce E. Gnade, John B. White · Journal of The Electrochemical Society · 1985 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17