High-pulse-rate 10-W KrF laser

Abstract

A discharge-pumped KrF excimer laser, utilizing a rapid recirculation of atmospheric-pressure gas, has generated 10 W of average output power at a pulse repetition rate of 1 kHz. The usual spark gap was replaced with a hydrogen thyratron for the switch in the pulse-forming network, and a corona discharge was used as the source for discharge preionization. Operating at 30 psi (absolute) and at a pulse rate of 2 Hz, a similar device has generated output pulse energies of 100 mJ at 1% efficiency and 80 mJ at 1.6% efficiency.