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Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools

Materials ScienceEngineeringMaterial ProcessingMicrofabricationDifferent Polishing ToolsUltrasonic Bound-abrasive PolishingMechanical EngineeringMaterial MachiningTool WearAbrasive ProcessSurface Polishing3D PrintingMicrostructureAbrasive Machining