Publication | Closed Access
Silicon Microring Modulator with Integrated Heater and Temperature Sensor for Thermal Control
69
Citations
3
References
2010
Year
Unknown Venue
Resistive HeaterEngineeringTemperature SensorIntegrated CircuitsSilicon On InsulatorMicro-electromechanical SystemElectronic DevicesIntegrated HeaterSilicon Microring ModulatorElectrical EngineeringHeat TransferMicroelectronicsMicrofabricationTemperature MeasurementThermal ManagementDiode-based Temperature SensorFirst DemonstrationThermal SensorThermal Engineering
The first demonstration of a silicon microring modulator with both an integrated resistive heater and diode-based temperature sensor is shown. The temperature-sensor exhibits a linear response for more than an 85 °C external temperature range.
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