Microelectronic Engineering · 2005 · 58 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceComputational Materials ScienceInterface ScienceSemiconductor MaterialsAb Initio MethodsDefect ModelingInterface EngineeringInterface ModelingSemiconductor DefectsSemiconductor InterfacesAb Initio CalculationsDefect CalculationsElectronic Structure Of DefectsInterface DefectsSilicon Defects
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