Publication | Closed Access
Dose and energy dependence of implanted ion profiles (9:≦ 1 ≦ 83) in the AZ111 photoresist
33
Citations
5
References
1987
Year
Ion ImplantationEngineeringPhotochemistryAz111 PhotoresistApplied PhysicsImplanted Ion ProfilesIon Beam InstrumentationIon BeamEnergy DependenceIon EmissionRadiation ImagingRadiation OncologyNuclear MedicineHealth Sciences
| Year | Citations | |
|---|---|---|
Page 1
Page 1