Scripta Materialia · 2001 · 23 citations · 14 references
Materials ScienceGas Deposition MethodEngineeringNanocrystalline Copper FilmNanomaterialsMechanical EngineeringApplied PhysicsMetallic NanomaterialsChemical DepositionNanocrystalline MaterialThermal StabilityChemical Vapor DepositionThin Film Processing
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