Measurement of surface roughness properties by using image speckle contrast

Abstract

As a practical monitoring tool for measurements of surface roughness properties, a new instrument is actually constructed on the basis of using the average contrast of image speckle patterns. With this instrument an experimental investigation on the contrast variation of image speckle patterns is conducted systematically for various surface roughnesses of the objects under different conditions of an optical imaging system. It is found that the roughness and correlation length of the objects can be precisely determined from the experimental curve of the contrast variation versus the point spread of the imaging system. The present method using image speckle patterns is superior to the previous one which uses the contrast variation of speckle patterns in the diffraction field.