Nanoscale characterization of the silicon dioxide-silicon carbide interface using elemental mapping by energy-filtered transmission electron microscopy - Concepedia

Concepedia

Publication | Closed Access

Nanoscale characterization of the silicon dioxide-silicon carbide interface using elemental mapping by energy-filtered transmission electron microscopy

16

Citations

10

References

2003

Year

K.-C. Chang, J. Bentley, Lisa M. Porter

Journal of Electronic Materials

Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsSemiconductor Device FabricationNanoscale CharacterizationNanoscale ScienceElemental MappingSilicon On InsulatorCarbide

References

	Year	Citations

Page 1