A low-frequency cyclic loading stage for the SEM

Abstract

A cyclic-loading stage for the ETEC Corporation SEM is described. The stage uses servo-controlled electro-hydraulic loading with positive feedback Specimens are loaded symmetric to the specimen centre line. Maximum load is 4893 N, with a maximum loading rate of 4 Hz. Resolution on the specimen is about 50.0 nm for static observation and 100.0 nm for dynamic (TV rate) observation in the secondary-electron mode. Observation of the specimen may also be made using backscattered electrons and in the channelling mode (channelling patterns and channelling contrast). Maximum specimen motion during cyclic loading is 15 mu m.