Some considerations of the thermodynamics and kinetics of the chemical vapour deposition of tungsten

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Choice Reviews Online · 1999 · 14.3K citations

Natural Sciences, Chemistry, Chemistry Education +7

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W.J. Orville-Thomas · Journal of Molecular Structure · 1973 · 6.8K citations

Natural Sciences, Chemistry, Chemistry Education +7

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Chemistry of the metal-gas interface

Surface Science Letters · 1980 · 350 citations

Natural Sciences, Chemistry, Materials Science +12

A Mathematical Model of the Coupled Fluid Mechanics and Chemical Kinetics in a Chemical Vapor Deposition Reactor

Michael E. Coltrin, Robert J. Kee, James A. Miller · Journal of The Electrochemical Society · 1984 · 342 citations

Natural Sciences, Chemical Engineering, Chemistry +17