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Efficient modeling parameter extraction for dual pearson approach to simulation of implanted impurity profiles in silicon

Device ModelingElectrical EngineeringPhysical Design (Electronics)EngineeringParameter ExtractionSilicon DebuggingImplanted Impurity ProfilesComputer EngineeringSemiconductor Device FabricationModeling And SimulationElectronic PackagingDual Pearson ApproachMicroelectronicsCircuit SimulationMultiscale Modeling