Journal of Vacuum Science and Technology · 1969 · 12 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMechanical Behavior Of MaterialsThin FilmsDislocation MechanicsDislocation TheoryThin Film AnnealingThin Film Mechanical PropertiesThin Film StrainThin-film MaterialsAnnealing Temperature EffectsDislocation BehaviorDislocation DensityStress-strain AnalysisStress-strain CurveStress-strain RelationsTensile DeformationTensile Testing
Single-crystal silver films of various surface orientations were prepared with thicknesses of 0.4–7 μ, and tensile tests were carried out for the films in as-deposited and annealed (860° C) states. Stress-strain curves were found to depend on the tensile direction and the film orientation. Structural observations were done with 500-kV and 1-MV electron microscopes. Dislocations are tangled in the as-deposited films thicker than 0.2 μ. Dislocation density is in the order of 1010/ cm2. Twins and stacking faults do not exist. The annealing causes subgrain formation in (11̄0) and (111) films, but recrystallization in (001) films. Deformed structures are different according to the tensile directions. Based on the structural observations, the mechanical properties are discussed.