Evaluation of buffer layers for hot filament chemical vapor deposition diamond films on silicon substrates - Concepedia

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Evaluation of buffer layers for hot filament chemical vapor deposition diamond films on silicon substrates

17

Citations

4

References

1997

Year

Ashok Kumar, Q You, Jayanta Kapat, A. Mangiaracina, A Catletge, Yogesh K. Vohra

Thin Solid Films

Materials ScienceDiamond-like CarbonElectrical EngineeringEngineeringMicrofabricationNanoelectronicsSurface ScienceApplied PhysicsBuffer LayersSilicon SubstratesThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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