Structural properties of Y2O3 stabilized ZrO2 films deposited by reactive thermal coevaporation

Abstract

Films of Y2O3 stabilized ZrO2 were obtained by reactive thermal coevaporation using an electron gun. These films were deposited on nickel substrates at substrate temperature to 500 °C, while the oxygen pressure was held to 4×10−5 Torr. The film structure was characterized by x-ray diffraction, the film composition has been determined by electron probe microanalysis. Postdeposition x-ray analysis showed the cubic phase of ZrO2. The cubic phase’s lattice parameter presented a monotonic increase with increased Y2O3; the mole fraction of Y2O3 was varied from 0.6% to 18.5%.