Metrology source for high-resolution heterodyne interferometer laser gauges

Serge Dubovitsky, D. Seidel, Duncan T. Liu, R.C. Gutierrez

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 15 citations · 0 references

Concepts

Abstract

We describe the development, functional performance, and space-qualification status of a Metrology Source suitable for implementation of space-based metrology systems with picometer-level relative displacement measurement and micron-level absolute displacement measurement resolution. The Metrology Source consists of the following components: lasers, frequency stabilization system, frequency shifters, and frequency modulators. All components are interconnected by polarization maintaining fibers to facilitate integration into a lightweight space-qualifiable module.