Characteristics of VHF H₂ Plasma Produced at High Pressure

Abstract

Abstract A VHF H 2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)