Optical Engineering · 1997 · 47 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOpticsPhotonicsElectro-optic MaterialsIntegrated OpticsIntegrated PhotonicsOptical MemsPhotonic Integrated CircuitsSilicon PhotonicsIntegrated Electro-optic DevicesIntegrated Optical ModulatorsIntegrated Optical ResonatorsIntegrated Optical WaveguidesIntegrated Waveguides