Journal of Applied Physics · 1992 · 15 citations · 11 references
Carbon PlatesEngineeringCrystal Growth TechnologyHeteroepitaxial GrowthThin Film Process TechnologyVacuum DeviceChemical DepositionCondensation PhaseEpitaxial GrowthThin Film ProcessingMaterials SciencePhysicsCrystallographySurface ScienceApplied PhysicsCondensed Matter PhysicsSrf2 Thin FilmsThin FilmsChemical Vapor Deposition
The composition of SrF2 thin films deposited on carbon plates by sublimation under ultrahigh vacuum has been investigated mainly by Rutherford backscattering (RBS) of α particles as a function of the substrate temperature during the condensation phase and of the thickness of the layers. It is shown that for TS = 270 °C the obtained films are stoichiometric, homogeneous, and quasi-insensitive to air exposure. The structure of such layers grown on (100)InP single crystals has been deduced from the study of channeling phenomenon. It is demonstrated that the RBS minimum yield χmin, measured on SrF2, decreases with increasing thin-film thickness, varying from 100 to 400 nm. For a 400-nm-thick SrF2 thin film at 350 nm from the interface χmin=0.05 showing that the layer is well crystallized and presents the same orientation as the substrate.
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Monte Carlo Channeling Calculations
J. H. Barrett · Physical review. B, Solid state · 1971 · 681 citations
Engineering, Monte Carlo Methods, Computational Chemistry +18
Proton induced X-ray emission as a tool for trace element analysis
F. Folkmann, C. Gaarde, Torben Huus et al. · Nuclear Instruments and Methods · 1974 · 284 citations