Development of thick-foil and fine-pitch GEMs with a laser etching technique - Concepedia

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Development of thick-foil and fine-pitch GEMs with a laser etching technique

DOI Full Paper Access

57

Citations

14

References

2009

Year

Toru Tamagawa, Asami Hayato, Fumi Asami, K. Abe, Satoru Iwamoto, Satoshi N. Nakamura, Atsushi Harayama, T. Iwahashi, Saori Konami, H. Hamagaki,

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Materials ScienceMaterials EngineeringAdvanced Laser ProcessingDiamond-like CarbonEngineeringLaser Etching TechniqueMicrofabricationMaterials FabricationFabrication TechniqueApplied PhysicsLaser ApplicationsFine-pitch GemsLaser Processing TechnologyPlasma EtchingMicrostructure

References

	Year	Citations

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