Broadband Membrane Reflectors on Glass

Abstract

We report here high-performance broadband membrane reflectors based on crystalline silicon nanomembrane photonic crystals. A modified polydimethylsiloxane stamp transfer technique is developed for transferring large-area silicon membranes to glass substrates. Polarization-independent broad reflectivity at 1550-nm wavelength band was obtained from Si membrane reflectors, on both silicon and glass substrates. The experimental results also agree well with simulation results.